Effect of Tool-electrode Shape on Uniformity of Electrochemical Deposition and Dissolution on Resistive Workpieces

This work is devoted to the theoretical study of the effect of tool-electrode shape and operating conditions on the thickness uniformity of deposited and dissolved metal layer on the resistive workpieces. The Laplace's equation for the potential in the electrolyte solution, the Poisson's equation for the potential in the resistive workpiece, and the equation of metal thickness evolution were used as the mathematical model. The numerical solution was performed using the boundary element and finite element methods. The results of computer modeling demonstrate the effect of operating conditions and tool-electrode shape on the uniformity of metal electrochemical deposition and dissolution.