Analysis of surface mechanical properties effects on the dynamic characteristics of a circular micro-diaphragm with a distributed mass

The influences of surface mechanical properties effects on the dynamic characteristics of a circular micro-diaphragm with a partially uniformly distributed mass are investigated. Surface mechanical properties effects on two sides are considered to be different as one side of the diaphragm contacts with biochemical media. A size-dependent analytical model is developed based on the thin plate theory and surface elasticity theory for the micro-diaphragm with a partially uniformly distributed mass. The Galerkin procedure is used to solve the governing equation. The size-dependence of the natural frequency and mass sensitivity of the micro-diaphragm with different surface mechanical properties effects is discussed. Results show that the influences of different surface mechanical properties effects on the natural frequency and mass sensitivity are more significant for thinner micro-diaphragms. The influences depend on the differences in the surface mechanical properties effects of the two surfaces.