Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5485486 | Ultrasonics | 2017 | 8 Pages |
Abstract
A multilayer structure of TeO2/interdigital transducers (IDTs)/ZnO(112¯0)/Si(1 0 0) was proposed and investigated to achieve both high sensitivity and temperature-stability for bio-sensing applications. Dispersions of phase velocities, electromechanical coupling coefficients K2, temperature coefficient of delay (TCD) and sensitivity in the multilayer structures were simulated as functions of normalized thicknesses of ZnO (hZnO/λ) and TeO2 (hTeO2/λ) films. The fundamental mode of Love mode (LM) - surface acoustic wave (SAW) shows a larger value of K2 and higher sensitivity compared with those of the first mode. TeO2 film with a positive TCD not only compensates the temperature effect induced due to the negative TCD of ZnO(112¯0)/Si(1 0 0), but also enhances the sensitivity of the love mode device. The optimal normalized thickness ratios were identified to be hTeO2/λ = 0.021 and hZnO/λ = 0.304, and the devices with such structures can which generate a normalized sensitivity of â1.04 Ã 10â3 m3/kg, a TCD of 0.009 ppm/°C, and a K2 value of 2.76%.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Acoustics and Ultrasonics
Authors
Jing-Ting Luo, Ao-Jie Quan, Guang-Xing Liang, Zhuang-Hao Zheng, Sami Ramadan, Chen Fu, Hong-Lang Li, Yong-Qing Fu,