Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5488567 | Infrared Physics & Technology | 2017 | 13 Pages |
Abstract
We deposited amorphous Ge-Ga-Te thin films by the magnetron sputtering method, and investigated the corresponding structural and optical properties by various diagnosis tools. The as-deposited film is amorphous, while crystalline features appear gradually with increasing annealing temperature. The optical band-gap and refractive index for the as-deposited and annealed films were analyzed as a function of chemical composition. It was also found that, with increasing Te and decreasing Ge and Ga content, the films usually exhibited a higher refractive index as well as a smaller optical band gap, and the optical band gap decreased with increasing annealing temperature. These results are useful to the fabrication of integrated optical devices for the biomedical sensing applications.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Atomic and Molecular Physics, and Optics
Authors
Ning Dong, Yimin Chen, Ningning Wei, Guoxiang Wang, Rongping Wang, Xiang Shen, Shixun Dai, Qiuhua Nie,