Article ID Journal Published Year Pages File Type
5489639 Journal of Crystal Growth 2017 11 Pages PDF
Abstract
We report here the temperature-dependent incorporation kinetics of dimeric arsenic in InAs(001) homoepitaxy, using reflection high-energy electron diffraction (RHEED). Surface reconstructions, in combination with the RHEED investigation have provided insight into the growth of InAs(001), developing an accurate method of controlling the V:III ratio, which has been utilised to probe the low temperature epitaxial growth of indium arsenide epitaxial layers.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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