Status of sensor qualification for the PS module with on-chip pT discrimination for the CMS tracker phase 2 upgrade

The high luminosity upgrade of the LHC is targeted to deliver 3000 fb−1 at a luminosity of 5×1034 cm−2 s−1. Higher granularity, 140 collisions per bunch crossing and existing bandwidth limitations require a reduction of the amount of data at module level. New modules have binary readout, on-chip pT discrimination and capabilities to provide track finding data at 40 MHz to the L1-trigger. The CMS collaboration has undertaken R&D effort to develop new planar sensors for the pixel-strip (PS) module, which has to withstand 1×1015 cm−2 1 MeV neutron equivalent fluence in the innermost layer of the tracker. The module is composed of a strip sensor and a macro pixel sensor with 100 μm×1.5 mm pixel size. Sensors were characterized in the laboratory and the effects of different process parameters and sensor concepts were studied. This contribution presents a new sensor prototype with n-pixels in p-bulk material in planar technology for the PS module. A new inverted module concept is presented, which has advantages with respect to the baseline concept. Electrical characterization of sensors and SEM-images are presented.