Article ID Journal Published Year Pages File Type
5497274 Physics Procedia 2016 8 Pages PDF
Abstract
The multifunctional X-ray lithography “LIGA” station on beamline 0 at the VEPP-3 synchrotron source is part of the shared-use center “Siberian Synchrotron and Terahertz Radiation Center” (SSTRC) in Budker Institute of Nuclear Physics (BINP, Novosibirsk, Russia). The station is intended to exposure of resist layers on substrates of different shape and lateral dimensions of 1 to 10 cm. The development of process and re-equipment of the station goes forward, continuously. In this work we consider the current capabilities of the station; examples of microstructures fabricated are presented.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Physics and Astronomy (General)
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