Experimental Study on Micro Hole Drilling Using Ultrashort Pulse Laser Radiation

First, the required number of pulses for through hole drilling was estimated for material thicknesses ranging between 25μm and 1mm. It was found, that the polarization state of the laser beam has a considerable impact on micro hole formation. Therefore, linear and circular polarized laser radiation was applied. Finally, optimum parameters for highest available drilling quality and speed were identified.