| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 579243 | Journal of Hazardous Materials | 2011 | 11 Pages |
Abstract
⺠Membrane processes were used to regenerate Silicon CMP slurry effluent ⺠A two-step ultrafiltration process was performed at laboratory and industrial scales ⺠A new hybrid process (membrane ultrafiltration and chemical addition) is developed ⺠A ratio of 0.65 of dissolved chemicals allows RR and TTV to be within specifications ⺠At industrial scale, the hybrid process enables the reuse of electronic effluents
Keywords
Related Topics
Physical Sciences and Engineering
Chemical Engineering
Chemical Health and Safety
Authors
F. Testa, C. Coetsier, E. Carretier, M. Ennahali, B. Laborie, C. Serafino, F. Bulgarelli, P. Moulin,