Article ID Journal Published Year Pages File Type
614399 Tribology International 2015 38 Pages PDF
Abstract
A statistical study of the effects of deposition temperature and hydrogen flow on the wear behavior of DLC films was examined using the RSM method based on a central composite design. DLC films were deposited on the nitrocarburized AISI 4140 steel by the pulsed DC PACVD method at temperature range of 60-120 °C and in an atmosphere of hydrogen range of 0-40 sccm. Results indicated that a combination of relatively high deposition temperature and low hydrogen flow or low deposition temperature and high hydrogen flow produce DLC film with low wear rate and low friction coefficient.
Related Topics
Physical Sciences and Engineering Chemical Engineering Colloid and Surface Chemistry
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