A micro-model for elasto-plastic adhesive–contact in micro-switches: Application to cyclic loading

Stiction is a major failure mode in micro-electromechanical systems. In previous works, a statistical rough surfaces interaction model, for which only elastic adhesive–contact has been considered, was developed for multiscale analyzes.However, during the impact between rough surfaces, plastic deformations of asperities cannot always be neglected. In the present work, the adhesion between rough surfaces is studied considering the elasto-plastic deformations of the asperities, and a model predicting the resulting micro-adhesive–contact forces is derived.For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch. To determine the degree of plasticity involved, the impact energy of the movable electrode at pull-in is estimated. Thus the maximal adhesive force evolution during cyclic loading is predicted using the developed model.

► A micro-model predicting the adhesion of elasto-plastic rough surfaces is proposed. ► The model can be applied for materials with low plastic deformations. ► The model is applied to study the risk of stiction under cyclic loading.