| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 615598 | Tribology International | 2011 | 9 Pages |
Abstract
âºAn experimental investigation of the damping effects in several different gas chemistries on a vibrating micromachined structure was conducted. âºA corresponding numerical study using an analytical model was also performed and the results correlated with the experimental observations. âºThe analytical model is based on the compressible Reynolds equation. âºThe theoretical and experimental quality factor show reasonable agreement for different gases. âºAs expected, the quality factor decreases as the gas pressure increases. âºBoth experiments and numerical predictions suggest that these various gases may not affect the mechanical behavior significantly, and could be used for their unique electrical properties, such as permittivities.
Related Topics
Physical Sciences and Engineering
Chemical Engineering
Colloid and Surface Chemistry
Authors
Seong Jin Kim, Robert Dean, Robert L. Jackson, George T. Flowers,