| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 617970 | Wear | 2012 | 6 Pages |
This paper presents a sphere-like machining model in small-sized nanochannel fabrication and a cone-like machining model in large-sized nanochannel fabrication. The material removal rate is proportional to the normal force to the power of 3/2 in the sphere-like machining model. The material removal rate is proportional to the normal force in the cone-like machining model. The material removal coefficient decreases as the machining times increase under the same normal force. The material removal rate can be computed at a given normal force and machining times. Certainly, these models can also be used in the macro wear study.
► This paper presents a material removal model in AFM-based nanochannel fabrication. ► The material removal rate is proportional to the normal force to the power of 3/2 in the sphere-like machining model. ► The material removal rate is proportional to the normal force in the cone-like machining model. ► The presented model greatly enriches the current wear theory.
