Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6269156 | Journal of Neuroscience Methods | 2013 | 10 Pages |
Abstract
⺠The iridium film exhibits a much higher resistance to damage due to high laser power. ⺠The lower the laser fluence, the higher the humps of carbon debris. ⺠An electrode array tip laser ablated using a high fluence shows a distinctive boundary line between the exposure area and Parylene. ⺠Laser deinsulation of electrode tips with iridium film and subsequent activation of the iridium film are suitable for fabrication of high-performance silicon-based implantable devices.
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Authors
Je-Min Yoo, Sandeep Negi, Prashant Tathireddy, Florian Solzbacher, Jong-In Song, Loren W. Rieth,