| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 635435 | Journal of Membrane Science | 2011 | 4 Pages |
Abstract
We report here the design of a new three-dimensional structured porous silicon membrane having an accordion shape by anodizing of anisotropic KOH etched silicon wafer. A complete process is described and an application example as contamination detection of organic volatile by FTIR spectroscopy is proposed.
Graphical abstractFigure optionsDownload full-size imageDownload high-quality image (160 K)Download as PowerPoint slideHighlights► Accordion structured porous silicon membrane. ► Cancellation of interference pattern in transmission infrared spectroscopy. ► FTIR detection of contamination from packaging.
Keywords
Related Topics
Physical Sciences and Engineering
Chemical Engineering
Filtration and Separation
Authors
S. Cavalaglio, L. Robert, B. Gauthier-Manuel,