| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6505312 | Catalysis Today | 2014 | 6 Pages |
Abstract
- Multi plasma jet SWD system for thin film deposition has been developed.
- Langmuir probe measurement of electron temperature and density was performed.
- High quality ZnO thin films were prepared on quartz glass, ITO and Si substrates.
- Properties of doped ZnO films can be tuned by parameters of SWD deposition system.
Related Topics
Physical Sciences and Engineering
Chemical Engineering
Catalysis
Authors
J. OlejnÃÄek, J. Å mÃd, M. Äada, Å . Kment, O. Churpita, P. KÅ¡Ãrová, M. BrunclÃková, P. Adámek, M. Kohout, V. Valvoda, D. Chvostová, M. Zlámal, Z. HubiÄka,