Article ID Journal Published Year Pages File Type
652109 Experimental Thermal and Fluid Science 2012 9 Pages PDF
Abstract
► A microchannel device for the characterization of gas flows has been realized. ► Miniaturized temperature sensors have been realized on a silicon substrate. ► The microsensor system can be integrated in microchannels from different materials. ► The measuring principle of the sensor system has been validated with experiments. ► A calibration procedure for the microsensors has been identified.
Keywords
Related Topics
Physical Sciences and Engineering Chemical Engineering Fluid Flow and Transfer Processes
Preview
A sensor-equipped microchannel system for the thermal characterization of rarefied gas flows
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