Thermochromic VO2 films by thermal oxidation of vanadium in SO2

Thermochromic films of VO2 were prepared by a two-step procedure: Sputtering was first used to deposit metallic vanadium, and such layers were subsequently oxidized in SO2 at a temperature in the 600-650 °C range. X-ray diffraction, Raman spectroscopy, measurements of temperature-dependent electrical resistance, and spectrophotometric transmittance data at different temperatures were employed to demonstrate that the films consisted of polycrystalline VO2 with good thermochromism, especially when oxidized at the highest temperature. Oxidation in SO2 is able to produce VO2 without the stringent process control that can be an obstacle for making VO2 by oxidation in O2.