Article ID Journal Published Year Pages File Type
6536501 Solar Energy Materials and Solar Cells 2012 8 Pages PDF
Abstract
► Single-chamber process for industrial-like reactors was developed. ► In-situ chamber evacuation at p/i-interface reduces the B-concentration to 1017 cm−3. ► a-Si:H cells with high initial 10.2% and stable 7.7% efficiencies were achieved. ► The results can compete with those of cells deposited in multi-chamber system.
Related Topics
Physical Sciences and Engineering Chemical Engineering Catalysis
Authors
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