Numerical study on three-dimensional isothermal solid-gas flow and deposition process in a deposition chamber

The present paper investigates the three-dimensional isothermal solid-gas turbulent flow and deposition process in a deposition chamber with numerical methods. The chamber diffusive angle (α) is varied to examine its influences on the flow fields as well as deposition performance. The investigated cases include diffusive angles equal to 5°, 9° and 15°. The results show that diffusive angles have profound effects on the recirculation structure in flow fields, and accordingly, the particle motion and deposition performance are significantly influenced. Among the three diffusive angle cases, both of the particle deposition efficiency and average impact velocity are largest in the α = 5° case; nonetheless, the deposition on the substrate exhibits the most non-uniform distribution in the case. These results provide elementary and worthwhile information for the practical design of the deposition chamber.