Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7002019 | Tribology International | 2018 | 6 Pages |
Abstract
Chemical mechanical polishing of sapphire with a novel catalyst (SoFeIII)-based colloidal silicon dioxide has been studied with high resolution transmission electron microscopy and X-ray diffraction. It has been found that a polytype of aluminun trihydroxide is formed on the polished crystal surface when SoFeIII-80 °C catalyst is used, while aluminum silicate hydrate layer is found on the polished sapphire surface when burnished with catalyst-free slurry. And the novel catalyst plays effective performance towards improving the removal rate of sapphire, and its removal rate is 7.21 μm/h, 1.66 times than the material removal rate obtained with catalyst-free slurry. Additionally, the optimum CMP removal by SoFeIII-80 °C yielded an ultra-smooth wafer surface with an average roughness of 0.0543 nm.
Related Topics
Physical Sciences and Engineering
Chemical Engineering
Colloid and Surface Chemistry
Authors
Li Xu, Xin Zhang, Chengxi Kang, Rongrong Wang, Chunli Zou, Yan Zhou, Guoshun Pan,