Surface roughness and erosion rate of abrasive jet micro-machined channels: Experiments and analytical model

This paper presents experimental data on the effect of particle size, velocity, and angle of attack on the roughness of unmasked channels machined in borosilicate glass using AJM. Single impact experiments were conducted to quantify the damage due to the individual alumina particles. Based on these observations, the assumed location of lateral crack initiation in a relatively simple analytical model from the literature was modified, and used to predict the roughness and erosion rate. The previous model, which calculated an areal roughness, was also modified to yield a 2D linear value of Ra so that it could be compared with linear profilometer scans. This modified model predicted the steady-state roughness and erosion rate of unmasked channels with average errors of 36% and 73%, respectively.