| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7005387 | Wear | 2012 | 9 Pages |
Abstract
⺠We establish a statistical model for the prediction of MRR in polishing ⺠MRR increases with the abrasive volume concentration and then settles down. ⺠The range of the particle size distribution makes the MRR vary in a different manner. ⺠Different types of active particles contribute quite differently to MRR. ⺠A harder or a more porous pad will lead to a larger MRR.
Keywords
Related Topics
Physical Sciences and Engineering
Chemical Engineering
Colloid and Surface Chemistry
Authors
X.L. Jin, L.C. Zhang,