Position Sensor Performance in Nanometer Resolution Feedback Systems

The performance of precision mechatronic systems is restrained by the linearity, bandwidth and resolution of position sensors. Unfortunately, these parameters may not be available in a form that allows direct comparison between sensors or the prediction of closed-loop performance. This article presents concise definitions for the linearity, drift, bandwidth and resolution of position sensors. These definitions allow position sensors to be readily compared and the performance of feedback systems to be accurately predicted.