A novel flexure-based 3-DOF micro-parallel manipulator with a gripper for micro/nano manipulation

This paper presents the design and analysis of a novel compliant flexure-based micro-parallel manipulator with gripper, which is with translational 3-DOF and driven by electromagnetic actuators. The stage is constructed with a symmetrical structure by employing three parallel PUU legs, a moving platform and a fixed platform. The mobility characteristics of the stage is analyzed and proved via FEA method. The kinematics and dynamic modeling of the mechanical system of the stage are conducted by resorting to compliance matrix method, and analytical models for electromagnetic forces are also established, both mechanical structure and electromagnetic model are validated by finite element analysis(FEA) performed with ANSYS. The mechanical structures is analyzed in a multi-physics environmental simulation and electromagnetic actuators are applied in ANSYS too. Both FEA and the analytical models well demonstrate that the movement of the stage is purely translational. Based on the designed parameters, this micro-parallel manipulator can have a large workspace, a very high resolution, and a heavy payload ability.