Article ID Journal Published Year Pages File Type
7106958 Progress in Organic Coatings 2015 8 Pages PDF
Abstract

- Perfluoropolyether alkoxy silane was employed to coat oxidized Si wafers.
- The composition of the thin fluorinated coatings obtained was studied by XPS.
- Oxidized Si wafers were made hydrophobic and oleophobic.
Related Topics
Physical Sciences and Engineering Chemical Engineering Process Chemistry and Technology
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