Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7106958 | Progress in Organic Coatings | 2015 | 8 Pages |
Abstract
- Perfluoropolyether alkoxy silane was employed to coat oxidized Si wafers.
- The composition of the thin fluorinated coatings obtained was studied by XPS.
- Oxidized Si wafers were made hydrophobic and oleophobic.
Keywords
Related Topics
Physical Sciences and Engineering
Chemical Engineering
Process Chemistry and Technology
Authors
A. Vitale, A. Pollicino, E. Bernardi, R. Bongiovanni,