Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7117304 | Materials Science in Semiconductor Processing | 2018 | 6 Pages |
Abstract
We have developed and examined new and cost effective methods for fabrication indium tin oxide (ITO) film on flexible substrate. The ITO film is deposited to polyethylene terephthalate film using roll-to-roll (RTR) sputtering advanced technology. The film's properties are evaluated before and after heat treatment. Effect of post annealing time on the electrical, optical, structural and surface properties of RTR sputtered ITO films is estimated. In addition, mechanical flexibility of as-sputtered amorphous ITO and annealed crystalline ITO films are compared. It is estimated that post-annealing at 150â¯Â°C reduces sheet resistance and increase the optical transmittance of the ITO films. The best results are observed when annealing time is 60â¯min. In this case the sheet resistance of ITO is measured to be 125â¯Î©/sq. and optical transmittance is 87.3% at wavelength range from 380â¯nm to 780â¯nm. It is demonstrated successful operation of touch screen panels fabricated on annealed ITO film. It is estimated that post-annealing significantly improves ITO performance as compare of that as-deposited film. Based on Hall measurement and transmittance electron microscopy examinations, possible mechanism to explain the effect of post-annealing time on RTR sputtered ITO films is manifested.
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Authors
Hayk Khachatryan, Dong-Ju Kim, Moojin Kim, Han-Ki Kim,