| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7117500 | Materials Science in Semiconductor Processing | 2018 | 8 Pages |
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Minkyu Ju, Kumar Mallem, Subhajit Dutta, Nagarajan Balaji, Donghyun Oh, Eun-Chel Cho, Young Hyun Cho, Youngkuk Kim, Junsin Yi,