| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7117577 | Materials Science in Semiconductor Processing | 2018 | 8 Pages |
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
N.P. Klochko, K.S. Klepikova, D.O. Zhadan, S.I. Petrushenko, V.R. Kopach, G.S. Khrypunov, V.M. Lyubov, S.V. Dukarov, V.O. Nikitin, M.O. Maslak, A.Yu. Zakovorotniy, A.L. Khrypunova,