Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7117721 | Materials Science in Semiconductor Processing | 2018 | 4 Pages |
Abstract
Optical properties of well-known bulk materials can be significantly modified by decreasing dimensions to nm-size. Using Molecular Beam Epitaxy (MBE) and e-beam Physical Vapour Deposition (PVD) we have fabricated 20-30â¯nm-thick amorphous Ge, Te and Se films. The permittivities of investigated layers have been extracted from measurements of the Ψ and Î ellipsometric azimuths. We found that for all of the investigated films, the intensity of all bands in the permittivity spectrum is smaller than for bulk materials or thick (>â¯100â¯nm) films. Using the acquired optical constants along with the permittivity of a 20â¯nm-thick silver film, we have applied the Maxwell-Garnett equation to predict the permittivities of a silver film with Ge, Se or Te segregated in its structure. Implementing the parameters of 20â¯nm-thick Ge results in an 81â¯nm redshift of the segregation-induced band with respect to the experimental value, while implementing the parameters of 2â¯nm-thick Ge film results in a 95â¯nm blueshift of this band.
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Authors
Arkadiusz Ciesielski, Lukasz Skowronski, Wojciech Pacuski, Tomasz Szoplik,