| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7117734 | Materials Science in Semiconductor Processing | 2018 | 9 Pages |
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
V. Vinayakumar, C.R. Obregón Hernández, S. Shaji, D.A. Avellaneda, J.A. Aguilar Martinez, B. Krishnan,