Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7117919 | Materials Science in Semiconductor Processing | 2018 | 9 Pages |
Abstract
The second part of the paper deals with device degradation: based on a wide set of experimental results, we describe the physical mechanisms responsible for the worsening of the properties of the devices. More specifically, we demonstrate that stress in off-state conditions may result in measurable changes in the pinch-off voltage, mostly consisting in a negative-threshold instability (NBTI). The origin of this shift is discussed in detail; we also demonstrate that in a real-life cascode configuration (where a low, subthreshold leakage current flows through the device in the off-state), NBTI effects are mitigated. Finally, we discuss the stability of the gate-stack, induced by the exposure to positive gate bias.
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Authors
Matteo Meneghini, Alaleh Tajalli, Peter Moens, Abhishek Banerjee, Enrico Zanoni, Gaudenzio Meneghesso,