| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7117962 | Materials Science in Semiconductor Processing | 2018 | 10 Pages |
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Ji-Sub Park, Imtiaz Mahmud, Young-Chul Shin, Jun-Chan Choi, Byeonggon Kim, Han Jae Shin, Yoonseuk Choi, Hak-Rin Kim,