| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7118008 | Materials Science in Semiconductor Processing | 2018 | 9 Pages |
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Hayk Khachatryan, Hyeong-Pil Kim, Sung-Nam Lee, Han-Ki Kim, Moojin Kim, Kyoung-Bo Kim, Jin Jang,