Article ID Journal Published Year Pages File Type
7118020 Materials Science in Semiconductor Processing 2018 5 Pages PDF
Abstract
One-dimensional β-Ga2O3 nanostructures were grown at different temperatures on c-plane sapphire substrates by MOCVD using Au as catalyst. The structural, morphological and photoluminescence properties of β-Ga2O3 nanostructures grown at different temperatures were characterized and compared in detail. As the growth temperature was increased, β-Ga2O3 nanostructures exhibited improved crystalline quality and possessed a typical β-Ga2O3 structure with high purity. The β-Ga2O3 nanostructures grown at 750 °C showed intense ultraviolet-blue emission at room temperature. Different morphologies including islands-like, nanowires, nanorods, grain-like structures were obtained depending on the growth temperature. The correlation between the nanostructures shapes and the growth processes was also discussed.
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Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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