| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7118133 | Materials Science in Semiconductor Processing | 2018 | 7 Pages |
Abstract
We report the evidence for irreversible changes in the conductivity, Ï(T), of a-Ge3Nx (3.7
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Authors
N. Pinto, F. Caproli, G. Maggioni, S. Carturan, D.R. Napoli,