Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7118251 | Materials Science in Semiconductor Processing | 2018 | 5 Pages |
Abstract
Indium doped germanium crystals were grown in a hydrogen atmosphere using the Czochralski method. The electrical properties of indium doped germanium crystals were measured by Hall effect at 77Â K. The axial and radial distributions of indium in the germanium crystals were investigated. The effective segregation coefficient of indium in germanium is determined to be 0.0009 with the concentration of indium from 3 Ã 1012~1 Ã 1019Â cmâ3. The interface shape between melt and crystal determined the radial distribution of indium in germanium crystals.
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Authors
Guojian Wang, Hao Mei, Xianghua Meng, Dongming Mei, Gang Yang,