Article ID Journal Published Year Pages File Type
7118251 Materials Science in Semiconductor Processing 2018 5 Pages PDF
Abstract
Indium doped germanium crystals were grown in a hydrogen atmosphere using the Czochralski method. The electrical properties of indium doped germanium crystals were measured by Hall effect at 77 K. The axial and radial distributions of indium in the germanium crystals were investigated. The effective segregation coefficient of indium in germanium is determined to be 0.0009 with the concentration of indium from 3 × 1012~1 × 1019 cm−3. The interface shape between melt and crystal determined the radial distribution of indium in germanium crystals.
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Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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