Article ID Journal Published Year Pages File Type
7118252 Materials Science in Semiconductor Processing 2018 5 Pages PDF
Abstract
The influence of post deposition thermal annealing on the structure and gamma radiation sensing properties of thermally evaporated TeO2 thin films was studied. The as-deposited films showed amorphous nature, the crystallization into the mixed phase (tetragonal and orthorhombic) occurs on annealing at 350 °C and the crystallization into the pure tetragonal structure occurs at higher annealing temperatures. The grain size in the TeO2 films grew with the increase in annealing temperature. Among the thin films investigated, the films annealed at 150 °C showed the highest response and sensitivity to gamma radiation. The results also indicate the significance of the post deposition thermal annealing up to the temperature of 150 °C in improving the gamma radiation sensing properties of the TeO2 films.
Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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