| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7119090 | Materials Science in Semiconductor Processing | 2015 | 8 Pages |
Abstract
The nano-sized structured strips of Al2O3 films on the surface of the heterophase structure can serve as optical transmission channels and are quite efficiently introduced into the standard practices, which is of significant importance for micro- and optoelectronics.
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Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
P.V. Seredin, A.S. Lenshin, V.M. Kashkarov, A.N. Lukin, I.N. Arsentiev, A.D. Bondarev, I.S. Tarasov,