Article ID Journal Published Year Pages File Type
7121085 Measurement 2018 5 Pages PDF
Abstract
An integrated micro solenoid fluxgate sensor with a Co-based amorphous core is presented in this work based on the Micro-Electro-Mechanical System (MEMS) technologies. As the advantage of miniaturization, the micro fluxgate sensor is found to be operated under wide excitation frequency range of 100 kHz-1 MHz. Ultra-low frequency noise (<0.1 Hz) always arises in zero field time-domain signal acquisition under full excitation frequency range. An additional broadband transformer is placed before the excitation end of the sensor to eliminate the ultra-low frequency noise. The noise power density of the sensor working at 600 kHz is analyzed. The result shows the noise is 1.15 nT/Hz1/2@1 Hz without the transformer and 0.11 nT/Hz1/2@1 Hz with the transformer, while the noise rms level is 5.38 nT and 0.23 nT in the frequency range of 50 mHz-10 Hz respectively. For the MEMS micro fluxgate sensor, more stringent electromagnetic compatibility design for the sensor signal system is needed to eliminate additional noise derived from the electromagnetic radiated interference and the voltage disturbance.
Related Topics
Physical Sciences and Engineering Engineering Control and Systems Engineering
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