Investigating the effects of quadrature error in parametrically and harmonically excited MEMS rate gyroscopes

Some factors like environmental conditions and manufacturing errors affect performance of a MEMS rate gyroscope. Because they may result to parameter mismatch between the designed gyroscope and the fabricated one. The Parametrically excited gyros are more robust to these changes than the harmonically excited gyros. However, these types of gyros also experience reduction in their accuracy in angular velocity determination due to these changes. One of parameters that affect the accuracy of the gyroscope is quadrature error that here, its effect in the accuracy of angular velocity determination is investigated in two typically designed harmonically and parametrically excited MEMS gyroscopes. The studies are done solving the gyroscopes' equations analytically and numerically after addition of quadrature error. Finally, it's found that the quadrature error reduces the accuracy of the gyroscope. Accuracy reduction (equivalent to output error increasing) decreases with increasing angular velocity or decreasing quadrature error almost the same for two types of gyroscope.