Design of multi-degree-of-freedom micromachined vibratory gyroscope with double sense-modes

This paper presents a novel multi-degree-of-freedom (multi-DOF) micromachined vibratory gyroscope design operated at atmospheric pressure. In this design, the complete 2-DOF vibratory structure is utilized in drive-mode and sense-mode and also, the 2-DOF sense-mode is implemented in both driving frame and proof frame, which form the double 2-DOF sense-modes. The 2-DOF vibratory structure could provide drive-mode and sense-mode with large bandwidth and the double 2-DOF sense-modes could provide high gain of gyroscope system, which improves the inherent robustness and sensitivity simultaneously. The simulation results demonstrate that the summed signal of drive-mode dynamic response is consistent with that of sense-mode and that the gain of proposed multi-DOF micromachined vibratory gyroscope can reach up to −10 dB, increased by above 8 dB compared to the design with single 2-DOF sense-mode. Meanwhile, the 3 dB bandwidth of gyroscope system is larger than 200 Hz.