Experimental study on microsphere assisted nanoscope in non-contact mode

Microsphere assisted nanoscope was proposed in existing literatures to capture super-resolution images of the nano-structures beneath the microsphere attached on sample surface. In this paper, a microsphere assisted nanoscope working in non-contact mode is designed and demonstrated, in which the microsphere is controlled with a gap separated to sample surface. With a gap, the microsphere is moved in parallel to sample surface non-invasively, so as to observe all the areas of interest. Furthermore, the influence of gap size on image resolution is studied experimentally. Only when the microsphere is close enough to the sample surface, super-resolution image could be obtained. Generally, the resolution decreases when the gap increases as the contribution of evanescent wave disappears. To keep an appropriate gap size, a quantitative method is implemented to estimate the gap variation by observing Newton's rings around the microsphere, serving as a real-time feedback for tuning the gap size. With a constant gap, large-area image with high resolution can be obtained during microsphere scanning. Our study of non-contact mode makes the microsphere assisted nanoscope more practicable and easier to implement.