Experimental study on the development of a micro-drilling cycle using ultrashort laser pulses

Experiments testified that the drilling strategy was able to produce cylindrical holes with diameter of 180±2 μm on a 350 μm thick plate in total absence of burrs and debris within a drilling time of 3.75 s. Repeatability tests showed a process capability of nearly 99%. SEM inspection of the inner surface of the microholes showed the presence of elongated and periodic ripples whose size and inclination can be controlled adjusting the incidence angle of the beam over the tapered surface before the ultimate finishing phase.