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Biaxial flexure testing of free-standing thin film membrane with nanoindentation system

Article ID Journal Published Year Pages File Type
7133212 Sensors and Actuators A: Physical 2018 12 Pages PDF
Keywords
Biaxial flexure testFlexural strengthNanoindentationFinite element analysisPolysilicon
Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
Preview
Biaxial flexure testing of free-standing thin film membrane with nanoindentation system
Authors
Takashi Ozaki, Tomoyuki Koga, Norio Fujitsuka, Hiroaki Makino, Hiroshi Hohjo, Hiroaki Kadoura,
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Journal
Sensors and Actuators A: Physical
Journal: Sensors and Actuators A: Physical
Related Categories
Biaxial flexure test
Flexural strength
Nanoindentation
Finite element analysis
Polysilicon
Analytical Chemistry
Chemistry (General)
Electrochemistry
Inorganic Chemistry
Organic Chemistry
Physical and Theoretical Chemistry
Spectroscopy
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