Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7133229 | Sensors and Actuators A: Physical | 2018 | 23 Pages |
Abstract
A novel structure piezoresistive pressure sensor with annularly grooved membrane combined with rood beam has been designed for low pressure measurements. By introducing high concentrated stress profile (HCSP) and partially stiffened membrane (PSM) into the sensitive regions, the strain energy was concentrated at the rib structure and an oversize deflection was avoided at the center of the membrane, which effectively improved the sensitivity and linearity of the sensor. The structure design and geometry optimization of the sensitive membrane were also studied by finite element method (FEM), which helped the sensor chip achieve a high sensitivity and small pressure nonlinearity (PNL). Finally, the fabrication of a sensor with annularly grooved membrane and rood beam was reported. Experimental results showed that the sensor obtained a sensitivity of 30.9â¯mV/V/psi and a pressure nonlinearity of 0.25% FSS in the operating range of 0-1â¯psi at room temperature. Such results indicate that this novel structure sensor is suitable to be applied in measuring absolute micro pressure lower than 1â¯psi.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Chuang Li, Jianbing Xie, Francisco Cordovilla, Jinqiu Zhou, R. Jagdheesh, José L. Ocaña,