Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7133535 | Sensors and Actuators A: Physical | 2018 | 25 Pages |
Abstract
In this paper, wideband interdigital transducers (IDT) to excite surface acoustic waves (SAW) have been developed and optimized. Three spatial chirp configurations were studied in order to cover a large bandwidth ranging from 20 to 125â¯MHz with sufficiently large displacement amplitudes to enable the characterization of surfaces (structures, thin layers, coatings, etc.). It is shown that by optimizing the configuration of the spatial distribution (width and spacing) of the electrodes, it is possible to adapt the spectral distribution of the SAW generated and to obtain a desired spectrum over the entire range of over 100â¯MHz. Finally, it is shown that high frequency attenuation of SAW can be overcome thanks to an additional optimization of the IDT by emitting more energy at high frequencies. It is thus possible with these transducers to measure displacements of the surface acoustic waves propagating along distances greater than 20â¯mm.
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Authors
Dame Fall, Marc Duquennoy, Mohammadi Ouaftouh, Nikolay Smagin, Bogdan Piwakowski, Frédéric Jenot,