Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7133546 | Sensors and Actuators A: Physical | 2018 | 18 Pages |
Abstract
This paper presents the characterization of two prototyped fully integrated 62â¯+â¯62 row-column-addressed (RCA) 2-D transducer array probes, which are based on capacitive micromachined ultrasonic transducer (CMUT) and on piezoelectric transducer (PZT) technology, respectively. Both transducers have integrated apodization to reduce ghost echoes and were designed with similar acoustical features i.e. 3â¯MHz center frequency, λ/2-pitch and 24.8â¯mmâ¯Ãâ¯24.8â¯mm active footprint. The transducer arrays were assembled in a 3-D printed probe handle with electromagnetic shield and integrated electronics for driving the 128-channel coaxial cable to the scanner. The electronics were designed to allow all elements, both rows and columns, to be used interchangeably as either transmitters or receivers. The transducer characterization i.e. bandwidth, phase delay, surface pressure, sensitivity, insertion loss, and acoustical crosstalk, were based on several single element measurements, including pressure and pulse-echo, and were evaluated quantitatively and comparatively. The weighted center frequency was 3.0â¯MHz for both probes and the measured â6â¯dB fractional bandwidth was 109â¯Â±â¯4% and 80â¯Â±â¯3% for the CMUT and the PZT probe, respectively. The surface pressures of the CMUT and PZT were 0.55â¯Â±â¯0.06â¯MPa and 1.68â¯Â±â¯0.09â¯MPa, respectively, and the receive sensitivities of the rows (receiving elements) were 12.9â¯Â±â¯0.7â¯Î¼V/Pa and 13.7â¯Â±â¯2.1â¯Î¼V/Pa.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Mathias Engholm, Hamed Bouzari, Thomas Lehrmann Christiansen, Christopher Beers, Jan Peter Bagge, Lars Nordahl Moesner, Søren Elmin Diederichsen, Matthias Bo Stuart, Jørgen Arendt Jensen, Erik Vilain Thomsen,