Integration design of a MEMS based fuze

The design, fabrication and test of a novel MEMS fuze are presented in this paper. It is a multilayer stacked device: the bottom layer is the MEMS detonator, which can generate a high speed slapper (4088 m/s) when initiated by 2500 V surge voltage. The middle layer is the SA (safety and arming) device. With proper driven voltages, the SA device can generate 508.98 μm output displacement and realize changing safety mode to arming mode in 16 ms. The top layer is the MEMS encapsulation, which is integrated with the position limiting structure and energetic grain. 3D printing process and laser process are introduced during the whole fabrication process, and the total size of the device can be minimized into 15 mm × 17 mm ×5 mm successfully.