Design optimization & fabrication of micro cantilever for switching application

This paper presents a design optimization and fabrication of Micro Cantilever which is used for switching application. The length and thickness of a cantilever beam as well as a gap space between the electrodes determines actuation voltage and should be optimized to ensure the best performance of a device. To design the cantilever switch with low actuation voltage and the current density which can be handled by the aluminium interconnects. We have optimized the design of cantilever with Taguchi method of Design of Experiments. Analysis of variance is performed to get the important design parameters from varied parameters considered. It also provides a better understanding of the key factors contributing to the performances of MEMS cantilever switch. The optimized statistical data evaluated is used to simulate the design with help of CoventorWare software. The optimized device design is implemented and electrically tested.